![]() ![]() Heteroepitaxy is a kind of epitaxy performed with materials that are different from each other. Here the substrate is the thin-film material. Homotopotaxy is a process similar to homoepitaxy except that the thin-film growth is not limited to two-dimensional growth. In academic literature, homoepitaxy is often abbreviated to "homoepi". This technology is often used to grow a film which is more pure than the substrate and to fabricate layers having different doping levels. Homoepitaxy is a kind of epitaxy performed with only one material, in which a crystalline film is grown on a substrate or film of the same material. Otherwise, the epitaxial layer will be composed of a different compound this is referred to as heteroepitaxy. In the simplest case, the epitaxial layer can be a continuation of the same exact semiconductor compound as the substrate this is referred to as homoepitaxy. For the case of epitaxial growth of a planar film atop a substrate wafer, the epitaxial film's lattice will have a specific orientation relative to the substrate wafer's crystalline lattice such as the Miller index of the film aligning with the index of the substrate. One of the main commercial applications of epitaxial growth is in the semiconductor industry, where semiconductor films are grown epitaxially on semiconductor substrate wafers. The term epitaxy comes from the Greek roots epi (ἐπί), meaning "above", and taxis (τάξις), meaning "an ordered manner". Epitaxy can also play an important role while growing superlattice structures. For most technological applications, single domain epitaxy, which is the growth of an overlayer crystal with one well-defined orientation with respect to the substrate crystal, is preferred. Epitaxy can involve single-crystal structures, although grain-to-grain epitaxy has been observed in granular films. For most epitaxial growths, the new layer is usually crystalline and each crystallographic domain of the overlayer must have a well-defined orientation relative to the substrate crystal structure. The relative orientation(s) of the epitaxial layer to the seed layer is defined in terms of the orientation of the crystal lattice of each material. The deposited crystalline film is called an epitaxial film or epitaxial layer. ![]() Epitaxy (prefix epi- means "on top of”) refers to a type of crystal growth or material deposition in which new crystalline layers are formed with one or more well-defined orientations with respect to the crystalline seed layer. ![]()
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